| 1300 Series – Multi-Channel | |
| Pressure Range at Sample | 10-6 mbar up to 2 bar |
| Experimental Gas or Vapor Inlets | 3–8* |
| Purge Capability | Yes |
| Integrated Gas Analysis Capability | Yes |
| Tubing System |
All Metal |
| Biasing Contacts |
4 contacts |
| Heating Temperature |
>1000°C |
| Holder Cleaning | Bakeable to 160° C |
| EELS / EDS Compatible | Yes |
| TEM Compatibility | TFS/FEI, JEOL, Hitachi, Zeiss |
マルチチャンネル・ガス技術仕様
