| 1600 Series | |
| Tilt Range | ±45° depending on microscope and pole piece |
| Number of Electrical Contacts | 6, 8, or 9 * |
| Contact Type | Flexible wirebond contacts or fixed spring contact |
| Carrier | Removable Sample Carrier |
| Carrier Compatibility | Any Standard TEM Sample Supports |
| Sample Size | Fits up to 3 x 6mm samples |
| Wiring | Standard or low-noise shielded |
| TEM Compatibility | TFS/FEI, JEOL, Hitachi, Zeiss |
製品概要
当社の電気バイアス用ホルダーは、物質の電気的応答を調べることを可能にします。標準仕様の電気バイアス用ホルダーは、幅広い試料形状に対応し、着脱式チップキャリアを備えています。この設計により、ホルダー外で簡単に試料を準備することができ、当社が提供する、全ての被膜基板との互換性を持っています。低ノイズになるように設計された配線により、正確な観察と測定を可能にします。
アプリケーション事例
- ナノスケール材料の微細構造と電気的特性の相関研究
- 材料欠陥の発生状況と電気的応答の関係の研究
- エレクトロマイグレーションの研究
- MEMSを基にした機械的試験装置の操作
- 固体エネルギーデバイスに関わる試験のその場観察
オプションについて
1600シリーズのホルダー用特別オプション：
- ほぼすべてのTEM試料形状にフィットする特別設計の試料キャリア
- pAレンジの電流測定用低ノイズ、個別シールドされたオプション配線仕様
- ケースレー2400 SMU
ナノスケールでの温度マッピング
マイクロエレクトロニクス・デバイスは、TEMの分析ツールボックスを活用し、電気バイアス用ホルダーを使用することで、観察とテストを同時に行うことが可能です。UCLAが率いるチームは、バルクの温度をプラズモンを用いてナノメートルの空間分解能で測定する、非接触温度測定技術を実証しています。
参考文献： B.C. Regan et al. Nanoscale temperature mapping in operating microelectronic devices（動作中のマイクロ電子デバイスにおけるナノスケール温度マッピング）サイエンス誌（2015年）Abstract
著作権 © 2016 by アメリカ科学振興会.
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Alデバイスのジュール加熱とEELSスペクトル。画像の著作権 © 2016 by the American Association for the Advancement of Science（アメリカ科学振興協会
Using our electrical biasing holder, researchers at Penn State have demonstrated the room temperature dislocation-based plasticity and tremendous flaw tolerance of TiN film, which in bulk form is a brittle material. TiN loading was conducted using a MEMS device containing electro-thermal actuators. The researchers surmise that room-temperature dislocation activities resulted from the nucleation of pre-existing dislocations, which resulted from residual compressive stresses developed during deposition. As a result, the TiN films were tougher than the Ti films in the tested multilayers. The movie shows the dislocation movement at the crack tip following loading at room temperature.
Reference: S. Kumar, D.E. Wolfe, M.A Haque. “Dislocation shielding and flaw tolerance in titanium nitride,” International Journal of Plasticity 27:5 (2011) pp. 739–747 . Abstract
Movie copyright © 2010, Elsevier Ltd. All rights reserved.
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